Original languageEnglish
Pages (from-to)383-387
Number of pages5
JournalSemiconductor Science and Technology
Volume8
Issue number3
DOIs
Publication statusPublished - Mar 1993

    ASJC Scopus subject areas

  • Materials Chemistry
  • Electrical and Electronic Engineering

    WoS ResearchAreas Categories

  • Engineering, Electrical & Electronic
  • Materials Science, Multidisciplinary
  • Physics, Condensed Matter

ID: 7213886