Research output: Contribution to journal › Article › peer-review
Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization
AU - Gavrilov, N. V.
AU - Kamenetskikh, A. S.
AU - Trernikov, P. V.
AU - Emlin, D. R.
AU - Chukin, A. V.
AU - Surkov, Yu S.
PY - 2019/2/15
Y1 - 2019/2/15
KW - AlO coating
KW - Ion assistance
KW - Reactive thermal evaporation
KW - α-AlO
KW - HOLLOW-CATHODE
KW - ALPHA-AL2O3 COATINGS
KW - alpha-Al2O3
KW - PERFORMANCE
KW - LOW-TEMPERATURES
KW - VACUUM-ARC
KW - PLASMA
KW - ALUMINA COATINGS
KW - HARDNESS
KW - Al2O3 coating
KW - MAGNETRON SPUTTER-DEPOSITION
KW - MICROSTRUCTURE
UR - http://www.scopus.com/inward/record.url?scp=85058799383&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000457662700014
U2 - 10.1016/j.surfcoat.2018.12.065
DO - 10.1016/j.surfcoat.2018.12.065
M3 - Article
AN - SCOPUS:85058799383
VL - 359
SP - 117
EP - 124
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -
ID: 8541582