Thin FeNi films 100 nm in thickness and arrays of periodic square microelements (50, 70, and 300 µm in size of individual microelements) located in the same plane have been developed, synthesized, and experimentally studied. The structure, static magnetic properties, and ferromagnetic resonance features of film arrays created by ion-plasma sputtering with the use of masks have been comparatively analyzed. It is implied that a similar magnetic structure could be incorporated into multilayer sensor elements with a high giant magnetoimpedance to increase their sensitivity to magnetic field.