TY - JOUR

T1 - Generation of broad ion beams in sources based on Penning system with nonequipotential cathode

AU - Nikulin, S. P.

AU - Chichigin, D. F.

AU - Tretnikov, P. V.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - The development of a method of generation of uniform plasma in low-pressure glow discharges with oscillating electrons was discussed. On the separation of the cathode into several elements, with potentials of the parts being different, the method was based. It was shown by the experimental results that the use of the nonequipotential cathode in the Penning system enables effective control of spatial plasma distribution. It was found that the efficiency of ion extraction, defined as the ratio of beam and discharge currents, is equal to 30%.

AB - The development of a method of generation of uniform plasma in low-pressure glow discharges with oscillating electrons was discussed. On the separation of the cathode into several elements, with potentials of the parts being different, the method was based. It was shown by the experimental results that the use of the nonequipotential cathode in the Penning system enables effective control of spatial plasma distribution. It was found that the efficiency of ion extraction, defined as the ratio of beam and discharge currents, is equal to 30%.

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000221872500141

UR - http://www.scopus.com/inward/record.url?partnerID=8YFLogxK&scp=3042568912

U2 - 10.1063/1.1702112

DO - 10.1063/1.1702112

M3 - Conference article

VL - 75

SP - 1857

EP - 1859

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 5

ER -