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Результаты исследований: Вклад в журнал › Статья › Рецензирование
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TY - JOUR
T1 - Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
AU - Kovalev, Michael
AU - Nastulyavichus, Alena
AU - Podlesnykh, Ivan
AU - Stsepuro, Nikita
AU - Pryakhina, Victoria
AU - Greshnyakov, Evgeny
AU - Serdobintsev, Alexey
AU - Gritsenko, Iliya
AU - Khmelnitskii, Roman
AU - Kudryashov, Sergey
N1 - Текст о финансировании #1 We thank George Krasin from Lebedev Physical Institute for indispensable assistance in the graphical presentation of our scientific results. The equipment of the Ural Center for Shared Use “Modern nanotechnology” of Ural Federal University (Reg.#2968), which is supported by the Ministry of Science and Higher Education RF (Project #075-15-2021-677), was used. V.P.’s work was supported by Russian Science Foundation (project 21-72-00116). Текст о финансировании #2 This research was funded by the Ministry of Science and Higher Education of the Russian Federation (Ural Federal University Program of Development within the Priority-2030 Program).
PY - 2023
Y1 - 2023
N2 - The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results. © 2023 by the authors.
AB - The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results. © 2023 by the authors.
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U2 - 10.3390/ma16124439
DO - 10.3390/ma16124439
M3 - Article
VL - 16
JO - Materials
JF - Materials
SN - 1996-1944
IS - 12
M1 - 4439
ER -
ID: 41557486