Thermodynamic analysis of a new gas-phase method of obtaining high-purity aluminum nitride

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	97-102
Number of pages	6
Journal	Refractories and Industrial Ceramics
Volume	56
Issue number	1
DOIs	https://doi.org/10.1007/s11148-015-9790-8
Publication status	Published - May 2015

synthesis, aluminum nitride, thermodynamic analysis, ALN, MONOFLUORIDE, COATINGS

ID: 293214