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Protection of Cu from Oxidation by Ta Capping Layer. / Zhidkov, Ivan S.; Kukharenko, Andrey I.; Milyaev, Mikhail A. et al.
In: Coatings, Vol. 13, No. 5, 926, 2023.

Research output: Contribution to journal › Article › peer-review

Harvard

Zhidkov, IS, Kukharenko, AI, Milyaev, MA, Kravtsov, EA, Makarova, MV, Gapontsev, VV, Streltsov, SV, Cholakh, SO & Kurmaev, EZ 2023, 'Protection of Cu from Oxidation by Ta Capping Layer', Coatings, vol. 13, no. 5, 926. https://doi.org/10.3390/coatings13050926

APA

Zhidkov, I. S., Kukharenko, A. I., Milyaev, M. A., Kravtsov, E. A., Makarova, M. V., Gapontsev, V. V., Streltsov, S. V., Cholakh, S. O., & Kurmaev, E. Z. (2023). Protection of Cu from Oxidation by Ta Capping Layer. Coatings, 13(5), [926]. https://doi.org/10.3390/coatings13050926

Vancouver

Zhidkov IS, Kukharenko AI, Milyaev MA, Kravtsov EA, Makarova MV, Gapontsev VV et al. Protection of Cu from Oxidation by Ta Capping Layer. Coatings. 2023;13(5):926. doi: 10.3390/coatings13050926

Author

Zhidkov, Ivan S. ; Kukharenko, Andrey I. ; Milyaev, Mikhail A. et al. / Protection of Cu from Oxidation by Ta Capping Layer. In: Coatings. 2023 ; Vol. 13, No. 5.

BibTeX

@article{1a7cccb81c6d460cbc816de362acf34b,
title = "Protection of Cu from Oxidation by Ta Capping Layer",
abstract = "X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15, 20, and 30 {\AA}), and are presented. The XRR and XPS Ta 4f-spectra revealed a complete oxidation of the protective layer up to a thickness of 10 {\AA}. From the thickness of the capping layer of 15 {\AA}, a pure Ta-metal line appeared in the XPS Ta 4f-spectrum, the contribution of which increased up to 30 {\AA}. The XPS Cu 2p-spectra of the underlying copper layer revealed the oxidation with the formation of CuO up to a thickness of the Ta-layer of 10 {\AA}. Starting from a thickness of 15 {\AA}, the complete protection of the Cu layer against oxidation was ensured during exposure to the ambient atmosphere.",
author = "Zhidkov, {Ivan S.} and Kukharenko, {Andrey I.} and Milyaev, {Mikhail A.} and Kravtsov, {Evgeniy A.} and Makarova, {Marina V.} and Gapontsev, {Vladimir v.} and Streltsov, {Sergey V.} and Cholakh, {Seif o.} and Kurmaev, {Ernst Z.}",
note = "The obtained results were obtained in the framework of the fulfillment of the state task of the Ministry of Science and Higher Education of Russia (Project No. FEUZ-2023–0013, the Themes “Electron” grant No. AAAA-A18-118020190098-5, and the “Spin” grant No. AAAA-A18-118020290104-2).",
year = "2023",
doi = "10.3390/coatings13050926",
language = "English",
volume = "13",
journal = "Coatings",
issn = "2079-6412",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "5",

}

RIS

TY - JOUR

T1 - Protection of Cu from Oxidation by Ta Capping Layer

AU - Zhidkov, Ivan S.

AU - Kukharenko, Andrey I.

AU - Milyaev, Mikhail A.

AU - Kravtsov, Evgeniy A.

AU - Makarova, Marina V.

AU - Gapontsev, Vladimir v.

AU - Streltsov, Sergey V.

AU - Cholakh, Seif o.

AU - Kurmaev, Ernst Z.

N1 - The obtained results were obtained in the framework of the fulfillment of the state task of the Ministry of Science and Higher Education of Russia (Project No. FEUZ-2023–0013, the Themes “Electron” grant No. AAAA-A18-118020190098-5, and the “Spin” grant No. AAAA-A18-118020290104-2).

PY - 2023

Y1 - 2023

N2 - X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15, 20, and 30 Å), and are presented. The XRR and XPS Ta 4f-spectra revealed a complete oxidation of the protective layer up to a thickness of 10 Å. From the thickness of the capping layer of 15 Å, a pure Ta-metal line appeared in the XPS Ta 4f-spectrum, the contribution of which increased up to 30 Å. The XPS Cu 2p-spectra of the underlying copper layer revealed the oxidation with the formation of CuO up to a thickness of the Ta-layer of 10 Å. Starting from a thickness of 15 Å, the complete protection of the Cu layer against oxidation was ensured during exposure to the ambient atmosphere.

AB - X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15, 20, and 30 Å), and are presented. The XRR and XPS Ta 4f-spectra revealed a complete oxidation of the protective layer up to a thickness of 10 Å. From the thickness of the capping layer of 15 Å, a pure Ta-metal line appeared in the XPS Ta 4f-spectrum, the contribution of which increased up to 30 Å. The XPS Cu 2p-spectra of the underlying copper layer revealed the oxidation with the formation of CuO up to a thickness of the Ta-layer of 10 Å. Starting from a thickness of 15 Å, the complete protection of the Cu layer against oxidation was ensured during exposure to the ambient atmosphere.

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000997090100001

UR - http://www.scopus.com/inward/record.url?partnerID=8YFLogxK&scp=85160399581

U2 - 10.3390/coatings13050926

DO - 10.3390/coatings13050926

M3 - Article

VL - 13

JO - Coatings

JF - Coatings

SN - 2079-6412

IS - 5

M1 - 926

ER -

ID: 40042113