Research output: Contribution to journal › Conference article › peer-review
| Original language | English |
|---|---|
| Article number | 012012 |
| Journal | Journal of Physics: Conference Series |
| Volume | 2059 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 29 Oct 2021 |
| Event | 28th International Conference on Vacuum Technique and Technology, VTT 2021 - Saint Petersburg, Russian Federation Duration: 22 Jun 2021 → 24 Jun 2021 |
ID: 28950395