The rarefied gas flow through a short channel into a vacuum has been investigated computationally using the direct simulation Monte Carlo method. Taking into account the gas-surface scattering and the gas molecule-molecule interaction, the mass flow rate is calculated as a function of gas rarefaction and the length to height ratio. This study demonstrates that the effects of the gas molecule-molecule interaction and the gas-surface scattering can make a noticeable impact on the mass flow rate of the rarefied gas through a short channel into a vacuum. The maximum manifestation of these effects was evaluated.
Original languageEnglish
Pages (from-to)1393-1398
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume28
Issue number6
DOIs
Publication statusPublished - 1 Nov 2010

    ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

    WoS ResearchAreas Categories

  • Materials Science, Coatings & Films
  • Physics, Applied

ID: 37843951