The films of supersaturated CdxPb1-xS solid substitutional solutions (0 < x < 0,25) with thickness 0.6-1.0 μm were synthesized by chemical bath deposition. The dependences of dislocation density, crystallite sizes and texture coefficient versus the cadmium content in the films were determined by analyzing X-ray diffraction spectra with the use of modified method of Williamson-Hall (MWH).