Aluminum nitride is used in many sectors of industry, requiring high thermal conductivity. For production of dispersed aluminum nitride the gas-phase method has been proposed. It consists of a formation reaction of aluminum subgalogenide that is accompanied by its contact with gaseous nitrogen. A review of chemical reactors for production of aluminum nitride by the chemical gas-phase deposition method is presented. The total set of the reactors is discussed.
Translated title of the contributionReview of chemical reactors for production of aluminum nitride by subhalogenide method from gas phase
Original languageRussian
Pages (from-to)134-144
Number of pages11
JournalХимическая технология
Issue number3
DOIs
Publication statusPublished - 2020

    Level of Research Output

  • VAK List

    GRNTI

  • 61.35.00

ID: 12458269