FIELD: chemistry. SUBSTANCE: invention relates to chemical engineering of submicron aluminium nitride crystals in the form of hexagonal prisms and a combination of a hexagonal prism with a dipyramid and pinacoid, which can be used in creating elements of nano-, micro- and optoelectronics, as well as luminescent-active micro-size sensors for medical and biological purposes. Granules of metal aluminium are mixed with powder of aluminium trifluoride in ratio 1:1–3:1 and mixture is heated to temperature of formation of aluminium sub-fluoride vapours, equal to 1050–1150 °C, in an ammonia atmosphere fed into space above liquid aluminium with volumetric feed rate below 50 ml/min at absolute pressure 0.03–0.07 MPa. EFFECT: technical result consists in obtaining aluminium nitride crystals with the same fractional size from 70 nm to 1 mcm.
Translated title of the contributionMethod of producing submicron crystals of aluminium nitride: patent of invention
Original languageRussian
Patent number2738328
IPCC30B 23/00,C30B 29/38,C30B 29/40,C30B 29/66,C01B 21/072,B82B 3/00,B82Y 40/00,B82Y 20/00,B82Y 5/00
Priority date22/04/2019
Filing date22/04/2019
Publication statusPublished - 11 Dec 2020

    GRNTI

  • 29.00.00 PHYSICS

ID: 21244477